JPS6332936Y2 - - Google Patents

Info

Publication number
JPS6332936Y2
JPS6332936Y2 JP7362484U JP7362484U JPS6332936Y2 JP S6332936 Y2 JPS6332936 Y2 JP S6332936Y2 JP 7362484 U JP7362484 U JP 7362484U JP 7362484 U JP7362484 U JP 7362484U JP S6332936 Y2 JPS6332936 Y2 JP S6332936Y2
Authority
JP
Japan
Prior art keywords
outlet
lid
chamber
vacuum pump
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7362484U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60185074U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7362484U priority Critical patent/JPS60185074U/ja
Publication of JPS60185074U publication Critical patent/JPS60185074U/ja
Application granted granted Critical
Publication of JPS6332936Y2 publication Critical patent/JPS6332936Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Exhaust Silencers (AREA)
  • Compressor (AREA)
JP7362484U 1984-05-19 1984-05-19 真空ポンプの消音装置 Granted JPS60185074U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7362484U JPS60185074U (ja) 1984-05-19 1984-05-19 真空ポンプの消音装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7362484U JPS60185074U (ja) 1984-05-19 1984-05-19 真空ポンプの消音装置

Publications (2)

Publication Number Publication Date
JPS60185074U JPS60185074U (ja) 1985-12-07
JPS6332936Y2 true JPS6332936Y2 (en]) 1988-09-02

Family

ID=30613165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7362484U Granted JPS60185074U (ja) 1984-05-19 1984-05-19 真空ポンプの消音装置

Country Status (1)

Country Link
JP (1) JPS60185074U (en])

Also Published As

Publication number Publication date
JPS60185074U (ja) 1985-12-07

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